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● Mature exposure optical system with high quality and high-precision exposure.
● Proximity exposure mode, high resolution.
● High production beat and higher production capacity efficiency.
| Performance name | Technical indicators |
| Effective exposure area | ≥350*530mm |
| Shipping accuracy | ±0.1mm |
| Resolution | ≥20um |
| Resolution | ±15um |
| Machining accuracy | ± 0.15mm～± 0.2mm |
| CT | 14sExercise time+Exposure time |
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