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● Use Robot loading and unloading, realising fully automated operation, efficient production and processing.
● Adopt marble optical base + Z-axis, laser control system, automatic focussing mirror and laser head, visual automatic alignment unit, laser spot analyzer, combined with supporting integrated software to ensure product processing quality.
● Adopt electrostatic eliminator, USC, EFU, high-efficiency dust removal unit, fixture cleaning unit, etc. to meet the requirements of Class1000 in the processing area and Class100 in non-processed area.
● Adopt a zero-point alignment system to realise the rapid switching of fixtures of different products, and combine the displacement sensor to ensure the surface plane of the fixture.
● Equipped with AOI detection system, can realise the integration of processing and defect detection.
● Independently develop the laser control software "micro-cut" system, which supports CCD positioning, automatically recognises alignment targets, and conducts accurate processing.
● Support simple measurement function (it can measure the cutting accuracy of the cutting area, the thermal impact area, etc.).
● The equipment is connected to the factory CIM to realise the digital communication of equipment information and intelligent production.
Performance name | Technical indicators |
Panel size | 3~9寸 |
Single scan range | 50x50(mm) |
CT | 5.5S |
Drilling size | ≤ D ≤ 30μm |
HAZ | ≤50μm |
Accuracy | ±30μm |
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